| |
| Working temperature |
Room temperature |
Max. Scanning area
With high voltage amplifiers (HVA)
Without HVA |
(X,Y,Z)
1.8x1.6x1.8 micron3
140È130È140 nm3 |
| Max. Positioning area |
(X,Z) 5x11 mm2 |
Resolution
With HVA
Without HVA |
(X,Y)
0.3 A
0.02 A |
(Z)
0.02 A
0.0014 A |
| Verified resolution |
Atomic resolution on metals |
| Approaching and positioning method |
Piezo-inertional |
| Tunnel current range |
0,01-12 ná |
| Bias voltage range |
±10 V |
| Stationary drift |
0.1 nm/min |
| Resonant frequency of the scanner |
3 kHz |
| Feedback loop type |
Digital |
| Sample size |
(X,Y,Z) 10x6x2 mm3 |
| Resonant frequency of the suspension |
1.2 Hz |
| Vacuum module size |
200x200x630 mm3 |
| Vacuum module flange |
200 mm (DN160-CF) |
| Baking temperature |
150 C0 |
| Base pressure |
1x10-10 ôÏrr |
| Compatibility with other methods of influence and analysis of a
surface while scanning |
Ions, laser irradiation, electrons, molecules, optical
spectroscopy |
|
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